Hybrid Alkali Salt Catalysts‐Promoted CVD Growth of 2D MoSe₂–WSe₂ and WSe₂–MoSe₂ Lateral Heterostructures

A scalable growth of atomically-thin 2D transition metal dichalcogenides (TMDs) with defect-free large-area surfaces is crucial for developing high-performing optoelectronic devices. Herein, a method to grow large-area, high-quality MoSe2 monolayers, MoSe2–WSe2, and WSe2–MoSe2 lateral heterostructures using molten salt-based chemical vapor deposition (CVD) systematically reported. First, effects isolated inorganic (sodium chloride (NaCl) sodium nitrate (NaNO3)), organic (Perylene–3,4,9,10–tetracarboxylic acid tetrapotassium salt (PTAS), mixed (NaCl/NaNO3), hybrid organic–inorganic (PTAS/NaCl/NaNO3) catalysts on the CVD quality monolayers their WSe2 in MoSe2–WSe2 assemblies are investigated. Results show that (NaCl/NaNO3 PTAS/NaCl/NaNO3) support high-quality, low defect density. The supports but not counterpart. Meanwhile, optimally grown, supported by salt. These results ascribed difference associated kinetic thermodynamic mechanisms growths as starting materials. Last, it confirmed realized improved compared mechanically exfoliated counterparts. obtained TMD can be useful various applications.